Diaphragm pressure regulator for HP & UHP gases - RX3000

Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000

RX3000 are single stage free-diaphragm pressure regulators for HP & UHP applications. The first of its kind threadless pressure regulators for the highest level of purity.

Key advantages

Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE (PVDF, Polyimid optional)
	Diaphragm	SS 316L (Hastelloy® optional)
	Poppet	SS 316L (Hastelloy® optional)
	Spring	SS 316L (Hastelloy® optional)
	Spring Holder	SS 316L
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

Flow capacity (Cv)	0.09	0.15
Supply pressure effect I*	0.25	0.5

_{*1 bar / 100 bar inlet pressure change}

FLOW CURVES

RX3000 - Cv 0,09 Product image

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RX3000 - Cv 0,15

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Specifications

Max inlet pressure	240 bar (3500 psig), 21 bar (300 psig)
Outlet Pressure	0.7/ 2/4/7/10/21 bar (10/30/60/100/150/300 psig)
Temperature range	-20°C to +65°C (-4°F to +149°F)
Regulator type	Free diaphragm
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure	≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connections	Actuation	Inlet pressure	Options
RX	30	01	K	009	S	S	2W1	4F	M	021	H
	Free diaphragm 30	0.7 bar (10 psig) 01 2 bar (29 psig) 02 4 bar (58 psig) 04 7 bar (102 psig) 07 10 bar (145 psig) 10 21 bar (305 psig) 21	PCTFE K Polyimid V PVDF* P PTFE* T	0.09 009 0.15 015	Stainless Steel AISI 316L S Stainless Steel AISI 316 AOD Var V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	1/4” Female VCR 4F 1/4” Male VCR 4M	Handwheel M	21 bar (305 psig) 021 240 bar (3,500 psig) 240	Hastelloy Trim H Gauge (bar/PSI)* PG0 Gauge (MPa)*** PG1

I am interested

* PTFE,PVDF seat and 0,7 bar (10psig) outlet pressure are only available for 21 bar (305 psig) inlet pressure
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures

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