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Diaphragm high and low pressure line valve for HP & UHP gases - RX04
RX04 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX04 valve exists in different pressure versions.
Key advantages
  • 100% Helium Leak Test performed
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Reverse seat design for high life cycle
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Fluid specific seat material as standard options
  • Low internal volume
  • Constant bleed option available
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Additional Multi-port options
  • 270° multiturn handwheel with open/close indicator
  • Loto option
  • Pneumatic version available
  • Indicative switch option

Also available with LOTO device

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L,VAR
Seat PCTFE, PVDF, Polyimid
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 
Handwheel Aluminium (QT) or Plastic (MT)
Actuator Body SS 316L or Aluminium
Others Stainless Steel, Alloys and brass

SURFACE FINISH

S V
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin)

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE / PVDF (manual & pneumatic*) -40°C to +65°C (-40°F to +149°F)

Polyimid (manual & pneumatic*)

-40°C to +150°C (-40°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
RX04 (LM) Multiturn handwheel(1)(2) 20 bar
RX04 (HM) Multiturn handwheel(1)(2) 240 bar
RX04 (LQ) Quarter turn handwheel(1) 20 bar
RX04 (HQ) Quarter turn handwheel(1) 240 bar
RX04 (BP*) Pneumatically actuated 10 bar
RX04 (LP*) Pneumatically actuated(3) 20 bar 
RX04 (HP*) Pneumatically actuated(3) 240 bar

(1) FT (Panel Mounting) option available

(2) MSF LOTO option available

(3) Position indication switch available

*Add NO for normally open or NC for normally closed

 

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)0,2
Nominal seat diameter4 Mm
Wetted volume< 1.2 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
DrawingDrawing
Product Configurator
 
Surface finish
Maximum delivery pressure
Port configuration
Body material
Seat material
End connection
Options
RX04
S
LM
2W1
-
K
V 1/4 F
FT
 
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Multi-Turn Handwheel (20bar)
LM
Multi-Turn Handwheel (240bar)
HM
Pneumatically actuated (10 bar)*
BP*
Pneumatically actuated (20 bar)*
LP*
Pneumatically actuated (240 bar)*
HP*
Quarter-Turn Handwheel (20 bar)
LQ
Quarter-Turn Handwheel (240 bar)
HQ
2 ports configuration 1
2W1
2 ports configuration 2
2W2
3 ports configuration 4
3W4
3 ports configuration 5
3W5
3 ports configuration 6
3W6
3 ports configuration 8
3W8
3 ports configuration 9
3W9
4 ports configuration 10
4W10
4 ports configuration 11
4W11
SS 316L
-
VAR**
A
PCTFE (Kel-F®)
K
Polyimid
PI
PVDF
P
Metal face seal 1/4” - Female
V 1/4 F
Metal face seal 1/4” - Male
V 1/4 M
BWO 1/4”
B 1/4
BWO 6 mm
B6
Compression tube fittings
RDB 1/4
Compression tube fittings
RDB 6
Panel Mounting
FT
Electric limit switch***
CI
LOTO
MSF
Constant bleed
FPT
* Add NO for normally open or NC for normally closed
** On demand
*** On HP and LP actuators only
Downloadable catalogs, brochures
  • Download
    RX04
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    RX04F
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    RX08
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    RX08F
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    RX12
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    RX20
    Last update: Mar 26, 2024
    Available in: en/CN/JA
  • Download
    Complete UHP Solution
    Last update: Mar 13, 2024
    Available in: en/JA/CN
  • Download
    LOTO Locking Mechanism for UHP Line Valves
    Last update: Jan 25, 2023
    Available in: en
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